причем данные из всего файла
==================================================================================================================== ==================================================================================================================== 06/03/18 10:18:23 Recipe: J1_Tool_A500_Intel_approved Test Number: 1 Objective ID: 217G012-NG Objective Angle: 0 # Bicolor Multigrab frames: 8 # ANRA Frames: 3 # Dynamic loops: 1 Acquisition between measurements: 1 Target Location(um): (-3080,2161) Off-Center Vector(um): (0.000000,0.000000) Iter Index Filter1 Filter2 Box 1 Box 2 OVL X OVL Y(nm) Failure 1 1 500 nm 600 nm Outer Outer 4.10 -6.50 1 2 600 nm 700 nm Outer Outer 2.40 -5.00 1 3 400 nm 450 nm Outer Outer 3.50 -8.50 1 4 430 nm 500 nm Outer Outer 4.40 -6.80 1 5 450 nm 550 nm Outer Outer 4.50 -7.90 SUMMARY ======== Index Filter1 Filter2 <OVLx> <OVLy> 3sOVLx(DL) 3sOVLy(DL) 3SigX(MG) 3SigY(MG) Failures 1 500 nm 600 nm 4.10 -6.50 0.00 0.00 2.00 2.10 0 2 600 nm 700 nm 2.40 -5.00 0.00 0.00 2.70 3.20 0 3 400 nm 450 nm 3.50 -8.50 0.00 0.00 2.60 1.30 0 4 430 nm 500 nm 4.40 -6.80 0.00 0.00 4.20 3.10 0 5 450 nm 550 nm 4.50 -7.90 0.00 0.00 3.20 1.80 0 Final results ============= Max Delta<OVL>x: 8.00 3SigDelta<x>: 12.84 Total Delta<OVL>x: 12.40 Sum Delta<OVL>x: 17.70 Max Delta<OVL>y: -16.40 3SigDelta<y>: 23.74 Total Delta<OVL>y: 23.20 Sum Delta<OVL>y: -36.10 ==================================================================================================================== ==================================================================================================================== 06/03/18 10:21:44 Recipe: J1_Tool_A500_Intel_approved Test Number: 1 Objective ID: 217G012-NG Objective Angle: 0 # Bicolor Multigrab frames: 8 # ANRA Frames: 3 # Dynamic loops: 1 Acquisition between measurements: 1 Target Location(um): (-3080,2161) Off-Center Vector(um): (0.000000,0.000000) Iter Index Filter1 Filter2 Box 1 Box 2 OVL X OVL Y(nm) Failure 1 1 500 nm 600 nm Outer Outer 3.00 -5.80 1 2 600 nm 700 nm Outer Outer 1.60 -4.00 1 3 400 nm 450 nm Outer Outer 3.30 -7.20 1 4 430 nm 500 nm Outer Outer 3.20 -5.90 1 5 450 nm 550 nm Outer Outer 3.90 -6.30 SUMMARY ======== Index Filter1 Filter2 <OVLx> <OVLy> 3sOVLx(DL) 3sOVLy(DL) 3SigX(MG) 3SigY(MG) Failures 1 500 nm 600 nm 3.00 -5.80 0.00 0.00 1.50 1.60 0 2 600 nm 700 nm 1.60 -4.00 0.00 0.00 2.50 2.30 0 3 400 nm 450 nm 3.30 -7.20 0.00 0.00 2.70 3.10 0 4 430 nm 500 nm 3.20 -5.90 0.00 0.00 3.40 2.50 0 5 450 nm 550 nm 3.90 -6.30 0.00 0.00 2.70 3.20 0 Final results =============
зарание спасибо